Low power consumption hydrogen sensor
 Resistive sensor of explosive concentrations of hydrogen
 Hydrogen gas analyzers                             
 Hydrogen sulphide gas-analyzer                      
 Nitrogen dioxide gas-analyzer                    
 Ammonia gas analizer                              
 Sensor based explosives detector                      
 Portative hydrogen leak detector                      
 Portative hydrogen gas-analyzer VG-2                       
 Portative hydrogen gas-analyzer VG-5                      
 Publications 2003 
 Publications 2004 
 Publications 2005 
 Publications 2006 
 Publications 2007 
 Publications 2008 
 Publications 2009 
 Publications 2010 
 Publications 2011 
 Publications 2012 
National Research Nuclear University MEPhI

Solid state and nanosystems physics department
Laboratory "Development and making of sensors based on MIS-structures"

MOS-sensors D-1

   D-1 sensors are suitable for measuring the concentrations of the following gases: hydrogen, deuterium, hydrogen sulphide, nitrogen dioxide, ethylmercaptan, chlorine and ammonia. The basis of the sensor is MIS (metal-insulator-semiconductor) - structure MOS-sensors D-1 Pd-Ta2O5-SiO2-Si, which capacitance changes when reaction with gases occures. The sensor fabrication technology is based on the microelectronics device fabrication technologies and the thin film laser deposition technique. Sensor can be used for measuring the concentration of any gas among noted before, in ambient temperature range –30..+40°С and RH 30 до 90% (30°С).

Gas Measurable concentration range, ppm Response times, τ0.9, min Relaxation times, τ0.1, min Working temperatures, ºС Lifetime, years
Cl2 0,001 - 10 10 10 100 - 190 * 2
H2S 0,005 - 0,3 5 15 120 1
NO2 0,01 - 10 10 20 100 - 190 * 2
C2H5SH 0,01 - 0,3 5 15 120 1
H2, D2 10-1 - 104 0,1 - 5 0,1 - 5 100 5
NH3 0,02 - 10 8 20 100 - 190 * 2

* - in case of pulse heated sensor in gas analyser when the temperature cyclically changes between working temperature 100ºС and 190ºС. Signal is measured when the sensor cools to 100ºС.

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